Super Thin Wafers
Diameters: 100mm to 200mm
Thickness as low as 60um
Application: Gyro-sensors, MEMS, etc.

Contact us for additional information
and/or a quotation.


Data for 4 inch DSP Thin Water
Wafer # Class # Cen. THK
UMTR
TTV
UMTR
PT5 #4
UMTR
PT5 #2
UMTR
PT5 #5
UMTR
PT5 #3
UMTR
STIR
UMTR
1 1-Accept 102.52 0.68 102.91 102.83 102.89 102.69 0.42
2 1-Accept 101.06 0.93 101.35 101.23 101.39 101.19 0.56
3 1-Accept 103.42 0.69 103.83 103.90 103.84 103.71 0.42
4 1-Accept 102.65 0.71 103.20 103.24 103.11 103.04 0.42
5 1-Accept 103.24 0.59 103.63 103.61 103.72 103.58 0.36
6 1-Accept 102.66 0.65 103.05 103.07 103.10 102.93 0.36
7 1-Accept 103.91 0.62 104.34 104.44 104.47 104.28 0.37

System ID: Undefined
Plant Order: Plant Id
Inspector: Inspector Id
Wafer#: 1
Wafer Diameter: 100MM
FQA: 94.00MM
Prim Fid Radius: 46.30 MM
Sec Fid Radium: 48.50 MM
Class: 1-Accept
Graph Content Flatness
Rotation Angle: 30.0 DEG
Scale: 10.00 UMTR
FLAT Ref Plane Best Fit
FPD-bf: -0.34 UMTR
TIR-bf: 0.64UMTR
TTV: 0.66 UMTR
Ave. THK: 99.21 UMTR
Min. THK: 98.85 UMTR
Max. THK: 99.51 UMTR
Cen. THK: 98.91 UMTR

Action: Printing graph...
Entry:

System ID: Undefined
Plant Order: Plant Id
Inspector: Inspector Id
Wafer#: 1
Wafer Diameter: 100MM
FQA: 94.00MM
Prim Fid Radius: 46.30 MM
Sec Fid Radium: 48.50 MM
Class: 1-Accept
Graph Content Flatness
Scale: 10.00 UMTR
FLAT Ref Plane Best Fit
FPD-bf: -0.33 UMTR
TIR-bf: 0.54UMTR
TTV: 0.59 UMTR
Ave. THK: 103.48 UMTR
Min. THK: 103.15 UMTR
Max. THK: 103.74 UMTR
Cen. THK: 103.23 UMTR

Action: Printing graph...
Entry:

 

Data for 4 inch DSP Thin Water

System ID: Undefined
Plant Order: Plant Id
Inspector: Inspector Id
Wafer#: 1
Wafer Diameter: 100MM
FQA: 94.00MM
Prim Fid Radius: 46.30 MM
Sec Fid Radium: 48.50 MM
Class: 1-Accept
Graph Content Flatness
Rotation Angle: 30.0 DEG
Scale: 5.00 UMTR
FLAT Ref Plane Best Fit
FPD-bf: -0.33 UMTR
TIR-bf: 0.54UMTR
TTV: 0.59 UMTR
Ave. THK: 103.48 UMTR
Min. THK: 103.15 UMTR
Max. THK: 103.74 UMTR
Cen. THK: 103.23 UMTR

Action: Printing graph...
Entry:

System ID: Undefined
Plant Order: Plant Id
Inspector: Inspector Id
Wafer#: 1
Wafer Diameter: 100MM
FQA: 94.00MM
Prim Fid Radius: 46.30 MM
Sec Fid Radium: 48.50 MM
Class: 1-Accept
Graph Content STIR (Numerical)
SFPD: -0.28 UMTR
SFPD%: 100.00%
STIR: 0.36 UMTR
STIR%: 100.00%
Width (X): 10.00MM
Height (Y): 10.00MM
Site Ref Plane Front Ref, Front Foc Partial Sites Inactive
X-Offset: 0.00MM
Y-Offset: 0.00MM
Row-Offsets: Inactive
STIR% Limits: 0.00/0.00

Action: Printing graph...
Entry:

The above map data of the dimple is a vacuum chuck mark, not an actual dimple.
This is just occurred during The measurement of data from the ADE measuring equipment.


Wafer # Class # Cen. THK
UMTR
TTV
UMTR
PT5 #4
UMTR
PT5 #2
UMTR
PT5 #5
UMTR
PT5 #3
UMTR
STIR
UMTR
1 1-Accept 103.23 0.59 103.61 103.55 103.68 103.54 0.36

 


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