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Belt-Drive Features / Specification Substrates
NC-6800
  • Belt drive wafer sorting system
  • Non-contact measurement of resistivity, thickness and PN
  • Standard cassette number: Loader: 4, Un-loader: 6
  • Any number of cassette is available
  • Wafer size: 3 inch to 8 inch (Choose 3 sizes) (or 8 inch and 12 inch)
  • Meas. range:
    (Resistivity)
    Low:   0.001 Ohm-cm to 0.05 Ohm-cm
    Middle:  0.05 Ohm-cm to 0.5 Ohm-cm
    High:  0.5 Ohm-cm to 60 Ohm-cm
    (Thickness)
    approx. 150 um to 800 um

Silicon Wafers


Robotic-Drive Features / Specification Substrates
NC-8000
  • Robotic drive wafer sorting system
  • Non-contact measurement of resistivity, thickness and PN
  • High through put by wafer rotary system
  • GO/NG sorting mode and Grouping mode are available
  • Standard cassette number: Loader: 4, Un-loader: 6
  • Any number of cassette is available
  • Wafer size: 4 inch to 8 inch (or 8 inch and 12 inch)
  • Meas. range:
    (Resistivity)
    Low: 0.001 Ohm-cm to 0.05 Ohm-cm
    Middle: 0.05 Ohm-cm to 0.5 Ohm-cm
    High: 0.5 Ohm-cm to 60 Ohm-cm
    (Thickness)
    approx. 150 um to 800 um

Silicon Wafers

NC-800S
  • Non-contact resistivity (or thickness ) and PN check 
  • High speed NG judgement placing system
  • Possible to measure wafers by choosing randomly
  • Wafer size: 6 inch and 8 inch
  • Meas. range:
    (Resistivity)
    0.001 Ohm-cm to 60 Ohm-cm
    (Thickness)
    approx. 150 um to 800 um

Silicon Wafers

 


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