Non-contact Method Features / Specification Substrates
PN-50 alpha
  • Non-contact and compact PN type checker
  • Principle: Photovoltaic effect
  • No damage and no stain by Non-contact method
  • Possible to check even oxidized film on water surface
  • Instantly P/N discrimination
  • Checking range:
    (Resistivity)
    0.1 Ohm-cm to 1000 Ohm-cm
    (Depends on surface conditions)
    (Thickness)
    Up to approx. 3mm
  • Available to build into an automatic wafer loading / unloading system (PN-80 alpha)

Silicon wafers
- Lapped
- Etched
- Polished
- Mirror
- Bulk

EC-80
  • Non-contact eddy current tester with easy manual operation
  • Compact design
  • Easy to set up measurement condition by JOG dial
  • Choose one type of sensor from 4 sensors by measurement range
  • Wafers size: 2 inch to 8 inch
  • Measurement range:
    (Resistivity)
    Low: 0.001 Ohm-cm to 0.05 Ohm-cm
    Middle: 0.05 Ohm-cm to 0.5 Ohm-cm
    High: 0.5 Ohm-cm to 60 Ohm-cm
    S/High: 5 Ohm-cm to 100 Ohm-cm
    (Sheet resistance)
    Low: 0.01 Ohm/sq to 0.05 Ohm/sq
    Middle: 0.5 Ohm/sq to 10 Ohm/sq
    High: 10 Ohm/sq to 1000 Ohm/sq
    S/High: 50 Ohm/sq to 2000 Ohm/sq

Silicon wafers

Thin Films
- Metal
- ITO

Chemical compound
- GaAs Epi layers and so on

NC-10
  • Easy operation and data processing by PC
  • Replacement sensors of Middle and High by measurement range
  • Temperature correction function (for silicon wafers)
  • Wafers size: 3 inch to 8 inch (There is a 2 inch and 12 inch version)
  • Measurement range:
    (Resistivity)
    Low: 0.001 Ohm-cm to 0.05 Ohm-cm
    Middle: 0.05 Ohm-cm to 0.5 Ohm-cm
    High: 0.5 Ohm-cm to 60 Ohm-cm
    *Available up to approx. 100 Ohm-cm
    (Sheet resistance)
    approx. Up to 3000 Ohm/sq
RC-1PN
  • Simple measurement unit for resistivity checking and P&N type
  • Resistivity: Eddy current (Non-contact) method
  • Non-contact and compact PN type checker
  • Principle: Photovoltaic effect
  • No damage and no stain by Non-contact method
  • Possible to check even oxidized film on wafer surface
  • Wafer size: 2 inch and 12 inch
  • Well suited for silicon wafers of solar cells and/or reclaimed wafers
  • Resistivity sorting (For example): 0.5 to 1 to 10 Ohm-cm (Other sorting ranges are available)
  • Easy operation by putting samples on the measurement stage
Silicon wafers
- Lapped
- Etched
- Polished
- Mirror
- Bulk
PN TESTER
  • Non-contact method
    Resistivity range 20mΩcm to 3000Ωcm
    Measurement time - 0.5s
  • Pen will light up for either P or N type

Silicon wafers
- Lapped
- Etched
- Polished
- Mirror
- Bulk

Silicon Ingots
Silicon Remelt
Silicon Pot Scrap

Resistivity+Thickness
(Manual)
Features / Specifications Substrates
RC1S / TH
  • Simple measurement unit for resistivity checking and thickness measurement
  • Resistivity: Eddy current (Non-contact) method
  • Thickness: Gauge method
  • Well suited for silicon wafers of solar cells and/or reclaimed wafers
  • Resistivity sorting (For example): 0.5 to 1 to 10 Ohm-cm (Other sorting ranges are available)
  • Easy operation by putting samples on the measurement stage
  • Built in PN type checkers (Resistivity + PN) is available (RC-2PN)
Silicon wafers
- Lapped
- Etched
- Polished
- Mirror
- Bulk
Manual Type Features / Specifications Substrates
TS-7D
  • Silicon Wafers and Scrap Resistivity Gauge
  • Contact method
Silicon Wafers
Silicon Remelt
Silicon Pot Scrap
PN-12 alpha
  • Contact PN type checker for low to high wide range resistivity
  • Principle: Thermo-electromotive force method (Seebek effect)
  • Electrode: Hot probe and Cold probe
  • Possible to check most figure of sample (Silicon wafer, Bulk, Ingot and so on) (Oxidized film on wafer surface: Not available)
  • Equipped with Thermometer and Analogue meter
  • Checking range:
    (Resistivity) 1m Ohm-cm to 20 K Ohm-cm
  • Available to build into an automatic wafer loading / unloading system (PN-12 beta)

Silicon Wafers
- Lapped
- Etched
- Polished
- Mirror
- Bulk

Silicon Ingots
Silicon Remelt
Silicon Pot Scrap

RESISTIVITY TESTER
  • 4-point contact for Resistivity
    - Computerized Accuracy with Smart Probe Technology
    - Selectable current sources: 2mils or 200 micro amps.
    - Reports Low Resistance condition.
    - Four Point Probe Head by Cascade.
    - Portable! Ultra Small!!
    - Ergonomic Probe handles (one for Type and one for Resistance)
    - LCD Displays actual resistance >0.10 ohm cm.
    - LCD Displays Type N/P with Distinct Sound reporting.
    - Auto mode checks Resistance and Type in 1 second.

Silicon Wafers
- Lapped
- Etched
- Polished
- Mirror
- Bulk

Silicon Ingots
Silicon Remelt
Silicon Pot Scrap

 


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