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Semi-Auto type Features / Specification Substrates
NC-80M
  • Sheet resistance multi-point measurement system for thin metal layers
  • Calibration function
  • Layer thickness direct read out with software
  • Min. 5mm position from edge can be measured
  • Wafer size: 3 inch to 8 inch
  • Meas. range:
    (Sheet resistance)
    5m Ohm/sq to 1 Ohm/sq
    Up to 20 Ohm/sq (Option)
  • Mapping software: Up to 121 points (Option)
  • Compatible fully (handling) automatic carrier system (Option)

Metal layers
- Ai, Cu, Ti, TiN
and so on

Semi-Auto type Features / Specification Substrates
NC-80MAP
  • Sheet resistance multi-point measurement system for chemical compound GaAs Epic layers, Gap, GaN etc
  • Calibration function
  • Min. 7mm position from edge can be measured
  • Wafer size: 2 inch to 6 inch (8 inch: Option)
  • Meas. range:
    (Sheet resistance)
    1 Ohm/sq to 3000 Ohm/sq
    0.001 Ohm/sq to 1 Ohm/sq (Option)
  • Mapping software: Up to 217 points (Option)
  • Compatible fully (handling) automatic carrier system (Option)

Chemical compound
- GaAs
- Gap
- GaN
and so on

Semi-Auto type Features / Specification Substrates
NC-50 / RG-1200S
  • Non-destroy eddy current method sheet resistance meas. system
  • Inclined stage: Designed with working property and space-saving
  • 4 point probe system is also available
    (cf. RT-80 / RG-1200S)
  • Caliblation function
  • Well suited model to ITO or Metal layers measurement which is required by Non-destroy
  • Glass (Substrate) size: Up to 1500mm x 1800mm
  • Meas. range:
    (Sheet resistance)
    <For Metal layers>
    approx. 5m Ohm/sq to 1 Ohm/sq
    <For ITO layers>
    approx. 1 Ohm/sq to 200 Ohm/sq
    (Other ranges: also available)
  • Display Sheet resistance and Film thickness
  • Mapping software (Option)

FPD substrates
- ITO layers
- Metal layers
and so on

NC-1000
  • High-precision measurement for material layers or ITO on glass substrate with non-contact eddy current sensors
  • Multi-points measurement with 3 sensors
  • Glass (Substrate) size: Up to 500 mmx 500 mm
  • Meas. range: (Sheet resistance)
    <For Metal layers> approx. 3 m Ohm/sq to 1 Ohm/sq
    <For ITO layers> approx. 1 Ohm/sq to 200 Ohm/sq
    (Other ranges: also available)
  • Displays Sheet resistance and Film thickness
  • Mapping software (Option)

FPD substrates
- ITO layers
- Metal layers
and so on

 


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