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Manual Type Features / Specification Substrates
EC-80
  • Non-contact eddy current tester with easy manual operation
  • Compact design
  • Easy to set up measurement condition by JOG dial
  • Choose one type of sensor from 4 sensors by meas. range
  • Wafers size: 2 inch to 8 inch
  • Meas. range:
    (Resistivity)
    Low: 0.001 Ohm-cm to 0.05 Ohm-cm
    Middle: 0.05 Ohm-cm to 0.5 Ohm-cm
    High: 0.5 Ohm-cm to 60 Ohm-cm
    S/High: 5 Ohm-cm to 100 Ohm-cm
    (Sheet resistance)
    Low: 0.01 Ohm/sq to 0.5 Ohm/sq
    Middle: 0.5 Ohm/sq to 10 Ohm/sq
    High: 10 Ohm/sq to 1000 Ohm/sq
    S/High: 50 Ohm/sq to 2000 Ohm/sq

Silicon wafers

Thin Films
- Metal
- ITO

Chemical compound
- GaAs Epi layers and so on

 

NC-10
  • Easy operation and data processing by PC
  • Replacement sensors of Middle and High by meas. range
  • Temperature correction function (for silicon wafers)
  • Wafers size: 3 inch to 8 inch (There is 2 inch and/or 12 inch version)
  • Meas. range:
    (Resistivity)
    Low: 0.001 Ohm-cm to 0.05 Ohm-cm
    Middle: 0.05 Ohm-cm to 0.5 Ohm-cm
    High: 0.5 Ohm-cm to 60 Ohm-cm
    *Available up to approx. 100 Ohm-cm
    (Sheet resistance)
    approx. Up to 3000 Ohm/sq
RC-1PN
  • Simple measurement unit for resistivity checking and P & N type
  • Resistivity: Eddy current (Non-contact) method
  • Non-contact and compact PN type checker
  • Principle: Photovoltaic effect
  • No damage and no stain by Non-contact method
  • Possible to check even oxidized film on wafer surface
  • Wafer size: 2 inch and 12 inch
  • Well suited to silicon wafer of solar cell and/or reclaimed wafers
  • Resistivity sorting (For example): 0.5 to 1 to 10 Ohm-cm (Other sorting range is available)
  • Easy operation by putting samples on the measurement stage
Silicon wafers
- Lapped
- Etched
- Polished
- Mirror
- Bulk
Semi-Auto Type Features / Specifications Substrates
NC-80 (NC-120)
  • Semi-automatic measurement system of Non-contact resistivity, thickness and PN check (Thickness, PN check: option)
  • Temperature measurement and Calibration function
  • Wafer size:
    <NC-80> 6 inch adn 8 inch
    <NC-120> 8 inch and 12 inch
  • Meas. range:
    (Resistivity)
    Low: 0.001 Ohm-cm to 0.05 Ohm-cm
    Middle: 0.05 Ohm-cm to 0.5 Ohm-cm
    High: 0.5 Ohm-cm to 60 Ohm-cm
    *Available up to approx. 100 Ohm-cm
  • Multi-point measurement up to 9 points
  • 17 points measurement (Option)
  • Mapping software (Option)
Silicon wafers
Full Auto Type Features / Specifications Substrates
NC-80 alpha
(NC-120 alpha)
  • Fully automatic measurement system of NC-80 with wafer loading robot
  • Temperature measurement and Calibration function
  • Wafer size:
    <NC-80> 6 inch adn 8 inch
    <NC-120> 8 inch and 12 inch
  • Meas. range:
    (Resistivity)
    Low: 0.001 Ohm-cm to 0.05 Ohm-cm
    Middle: 0.05 Ohm-cm to 0.5 Ohm-cm
    High: 0.5 Ohm-cm to 60 Ohm-cm
    *Available up to approx. 100 Ohm-cm
  • Multi-point measurement up to 9 points
  • 17 points measurement (Option)
  • Mapping software (Option)
Silicon Wafers

 


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