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Manual Type Features / Specification Substrates
TS-7D
  • Silicon Wafer and Scrap Resistivity Gauge
  • Contact method

Silicon wafers
Silicon Remelt
Silicon Pot Scrap

RT-70 / RG-7
  • Thickness input with easy JOG dial operation (RT-70 Tester)
  • Self-test function
  • Auto change-over measurement range function
  • 7 types of measurement modes
  • Wafer size: 2 inch to 8 inch
    (12 inch version is available: RG-70)
  • Meas. range:
    (Resistivity)
    1m Ohm-cm to 999.9k Ohm-cm
    (Sheet resistance)
    10m Ohm/sq to 9999k Ohm/sq
  • Stage: Electric probe up-down stroke
  • Equipped with RS-232C interface, Printer interface

Silicon wafers

Thin Films
- Metal
- Diffused
- ITO
and so on

RT-70 / RG-5
  • Manual probe up-down stroke stage
  • Specifications: Same as RT-70 / RG-7
  • Wafer size: 2 inch to 8 inch
  • Meas. range:
    (Resistivity)
    1m Ohm-cm to 999.9k Ohm-cm
    (Sheet resistance)
    10m Ohm/sq to 9999k Ohm/sq
Semi-Auto Type Features / Specifications Substrates
RT-80 / RG-80
RT-80 / RG-120

  • Recipe settings, Measurements and Data processing with easy PC operation
  • Test patterns: User programmable (Shape: Circle / Square)
  • Self-test function, Calibration function and Wide meas. range
  • Wafer size: 3 inch to 8 inch
    (12 inch version is available: RG-120)
  • Meas. range:
    (Resistivity)
    50u Ohm-cm to 40M Ohm-cm
    (Sheet resistance)
    0.5m Ohm/sq to 400M Ohm/sq
  • Thickness, Edge and Temperature correction function (for silicon wafers)
  • Display Sheet resistance and Film thickness
  • Mapping software: Up to 1221 points (Option)

Silicon wafers

Thin Films
- Metal
- Diffused
- ITO
- Ion-implanted
- Epitaxial
and so on

Full auto Type Features / Specifications Substrates
WS-3000
  • Designed to measure thin layer on silicon wafer
  • Thin layer 3nm is available
  • High accuracy tester Model RT-3000 equipped
  • Fully automatic cassette to cassette handling (GEM)
  • Rotary mechanism which can equip with 4 kinds of probe head
  • No need to exchange probe head for every meas. sample
  • Edge 1mm measurement is available by Dual meas. mode
  • Test patterns: User programmable
  • Wafer size: 12 inch (Option: 8 inch)
  • Meas. range:
    (Sheet resistance)
    1.0m Ohm/sq to 100M Ohm/sq
  • Internal resistance accuracy:
    +/-0.1% (1 Ohm to 1M Ohm)
  • Repeatability:
    CV = % of sigma less than 0.2%
  • 49 points mapping / 60 sec. (300mm wafer)
  • Tact: 120 sec. / wafer (inc. load - unload)
  • FOUP compatible
    (Option: SMIF / AM 3000)

Thin Films
- Metal
- Diffused
- Ion-implanted
- Epitaxial
and so on

Silicon wafers

Full auto Type Features / Specifications Substrates
WS-8800
  • Fully automatic model of RT-80 / RG-80 equipped with (Cassette to cassette) robot
  • Thickness measurement and PN check (Option)
  • Self-test function, Calibration function and Wide meas. range
  • Wafer size: 3 inch to 8 inch (12 inch version is available: RG-120 with Robot)
  • Meas. range:
    (Resistivity)
    50u Ohm-cm to 40M Ohm-cm
    (Sheet resistance)
    0.5m Ohm/sq to 400M Ohm/sq
  • Any number of cassette is available
  • Communication software, SMF or FOUP compatible (Option)
  • Mapping software: Up to 1221 points (Option)

Silicon Wafers

Thin Films
- Metal
- Diffused
- Ion-implanted
- Epitaxial
and so on

 


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